Tekonolosi Si'osi'omaga Tiiti Manifinifi

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Tekonolosi Si'osi'omaga Tiiti Manifinifi

Tekinolosi matagaluega ata manifinifi e faatatau i le fausia o vaega faaeletonika e faaaoga photolithography pe a uma ona gaogao substrate teuina i se ata manifinifi.

Auina atu le Suʻega

Faʻamatalaga

Faʻamatalaga Faʻamatalaga

Tekinolosi matagaluega ata manifinifi e faatatau i le fausia o vaega faaeletonika e faaaoga photolithography pe a uma ona gaogao substrate teuina i se ata manifinifi. O lenei tekinolosi ua avea ma auala e sili ona fiafia i ai mo le faia o ta'amilosaga microstrip ona o le lautele o vaega fa'amaufa'ailoga, maualuga le sa'o, lelei le fa'aputuga, maualuga le fa'atuatuaina, ma le lelei o le vevela -o uiga fa'avevesi. E masani ona fa'aoga i mea fa'atekonolosi fa'afoma'i, komipiuta -maualuga, auupega ma mea faigaluega, va'alele ma isi matā'upu.

O le lumanaʻi o oloa faʻataʻavalevale manifinifi o loʻo taoto i le itu o fausaga laina laʻititi laʻititi, maualuga le maualuga o le kalafi ma le saʻo, faʻaleleia le faʻalagolago, faʻaitiitia le voluma, ma le maualuga o le faʻaogaina o laina telefoni.

Tu'i → Sputtering → Fa'ateteina Layer Ata Ata → Ata pue → Su'e → Su'ega

1, Su'ega Mea: Fa'aaliga
Meafaigaluega Su'ega: Stereomicroscope
Metotia Su'ega: GJB548B Metotia 2032
Fa'asinomaga Fa'atekinisi: 80% o vaega fa'akalafi ua mae'a, ma e leai se u'amea o lo'o vaaia i vaega e le o-kalafi

2, Mea Fa'asu'esu'e : Aofa'iga Lautele
Meafaigaluega Su'ega : Vernier Caliper, Electronic Micrometer, Mea Su'e Ata
Metotia Su'ega:GJB548B,Metotia 2016
Fa'asinoga Fa'apitoa:

Fa'agasologa	masani	Sa'o Maualuga
Metotia	Sa'o Mea Sese	Sese
Ma'a olo	E itiiti ifo pe tutusa ile ± 50 µm	E itiiti ifo pe tutusa ile ± 25 µm
leisa	E itiiti ifo pe tutusa ile ± 100 µm	E itiiti ifo pe tutusa ile ± 50 µm

3, Su'ega Mea: Lithographic Metal Graphics
Meafaigaluega Su'ega : Mea Su'e Ata ,Metallographic Microscope
Metotia Su'ega:GJB548B,Metotia 2016
Fa'asinoga Fa'apitoa:

Aitema	Sese
Avanoa i luma ma tua	E itiiti ifo pe tutusa ile ±25 µm
Tusia Itu Tusa	E itiiti ifo pe tutusa ile ±25 µm
Laina Laina	±5 µm

4, Mea Fa'ata'ita'i: Membrane Adhesion
Meafaigaluega Su'ega: 3M610 Fa'amau Fa'amau
Metotia Su'ega: ASTM B571-97 Metotia Su'ega Tape
Fa'amatalaga Fa'amatalaga: I lalo ole 40X microscope, e leai se mea e pa'u'u ai mea o lo'o va'aia i luga o le membrane layer i so'o se ituaiga.

5, Mea Fa'ata'ita'i: Maualuluga Tete'e o le Membrane Layer
Meafaigaluega Su'ega: Laasaga vevela
Metotia Su'ega: Taofi i le 400 tikeri mo le 10 minute
Fa'amatalaga Fa'amatalaga: I lalo o le 40X microscope, e leai se fa'ailoga, pa'u, fa'afefe, po'o le pa'u o le membrane layer i so'o se ituaiga.

6, Isi Fa'asinoga Fa'apitoa

Aitema	Fa'asinoga Fa'apitoa
Laiti Laiti ole Metallized E ala i le Pu	Ole mafiafia ole palapala × 0.8
Le Mamao Laiti mai le Ta'ita'i Fa'aili i le pito o le Ceramic	0.050 mm
Lithographic Laiti Laiti Lautele	0.015mm
Tete'e	±10%